Nanoscale Structure Formation on Sputter Eroded Surface
نویسنده
چکیده
Experimental results on ion sputtered surfaces, covering amorphous and crystalline materials (SiO2 [1]), and both metals (Ag [2]) and semiconductors (Ge [3], Si [4,5]), have motivated extensive theoretical work aiming to uncover the mechanism responsible for ripple formation and kinetic roughening. A particularly successful model has been proposed by Bradley and Harper (BH) [6], in which the height h(x, y, t) of the eroded surface is described by the linear equation
منابع مشابه
Morphology of ion-sputtered surfaces
We derive a stochastic nonlinear continuum equation to describe the morphological evolution of amorphous surfaces eroded by ion bombardment. Starting from Sigmund s theory of sputter erosion, we calculate the coefficients appearing in the continuum equation in terms of the physical parameters characterizing the sputtering process. We analyze the morphological features predicted by the continuum...
متن کاملIon induced nanoscale surface ripples on ferromagnetic films with correlated magnetic texture
We have investigated the correlation between nanoscale surface ripple patterns and the magnetic texture of polycrystalline iron and nickel thin films. The ripple patterns were created by ion beam sputter erosion of films evaporated on Si substrates with 5 keV Xe ions under grazing incidence and fluences between 1015 and 1017 cm−2. The as-deposited films with an rms roughness of about 1 nm are m...
متن کاملRoughening of Ion-eroded Surfaces
Recent experimental studies focusing on the morphological properties of surfaces eroded by ion-bombardment report the observation of self-affine fractal surfaces, while others provide evidence about the development of a periodic ripple structure. To explain these discrepancies we derive a stochastic growth equation that describes the evolution of surfaces eroded by ion bombardment. The coeffici...
متن کاملEffect of surface morphology on the sputtering yields. II. Ion sputtering from rippled surfaces
Off-normal ion bombardment of solid targets with energetic particles often leads to development of periodically modulated structures on the surfaces of eroded materials. Ion-induced surface roughening, in its turn, causes sputtering yield changes. We report on a comprehensive theoretical study of the effect of rippled surface morphology on the sputtering yields. The yield is computed as a funct...
متن کاملSpontaneous nanoscale corrugation of ion-eroded SiO2: the role of ion-irradiation-enhanced viscous flow.
Grazing incidence x-ray scattering was used to determine the temperature and ion-energy dependence of nanoscale corrugations that form on an amorphous SiO2 surface eroded by Ar+ ions. The corrugation wavelength lambda* shows a nearly linear dependence on ion energy. Between room temperature and approximately 200 degrees C, lambda* depends weakly on temperature and above approximately 200 degree...
متن کامل