Nanoscale Structure Formation on Sputter Eroded Surface

نویسنده

  • B. Kahng
چکیده

Experimental results on ion sputtered surfaces, covering amorphous and crystalline materials (SiO2 [1]), and both metals (Ag [2]) and semiconductors (Ge [3], Si [4,5]), have motivated extensive theoretical work aiming to uncover the mechanism responsible for ripple formation and kinetic roughening. A particularly successful model has been proposed by Bradley and Harper (BH) [6], in which the height h(x, y, t) of the eroded surface is described by the linear equation

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تاریخ انتشار 2000